LFQ 系列
机械 - 交叉磙子
配重 - 双空气弹簧
解析度 - 0.3nm
静态抖动 - 10nm
重复精度 - ±90nm
定位精度 - ±200nm
Stage Model | LFQ-Z-60 | LFQ-Z-90 |
Travel | 60mm | 90mm |
Resolution | 0.3nm | 0.3nm |
Repeatability | ±90 nm | ±95 nm |
Accuracy | ±200nm | ±200nm |
Yaw | 2.5arc sec | 2.8arc sec |
Pitch | 5 arc sec | 5.3 arc sec |
Straightness | ±0.5 µm | ±0.8 µm |
Flatness | ±1.2 µm | ±1.3 µm |
Position Stability | 10nm | 10nm |
Load Capacity | 10kg | 15kg |
Maximum Speed | 450mm/s(No load) | 450mm/s(No load) |
Maximum Acceleration | 1G(No load) | 1G(No load) |
Stage Material | Aluminium | Aluminium |
Stage Mass | 3.5 kg | 4.2kg |
