SWA 系列
机械 - 交叉磙子
轴数 - XY 两轴
解析度 - 1.0 nm
静态抖动 - 5 nm
重复精度 - ±100 nm
定位精度 - ±200 nm
Stage Model | SWALLOW11 | SWALLOW22 |
Travel | 100*100mm | 200*200mm |
Resolution | 1.0nm | 1.0nm |
Repeatability | ±100 nm | ±150 nm |
Accuracy | ±200nm | ±300nm |
Yaw | 2.8arc sec | 3.1arc sec |
Pitch | 5 arc sec | 6.7 arc sec |
Straightness | ±0.5 µm | ±0.8 µm |
Flatness | ±1.4 µm | ±1.8 µm |
Position Stability | 5nm | 5nm |
Load Capacity | 15kg | 15kg |
Maximum Speed | 600mm/s(No load) | 800mm/s(No load) |
Maximum Acceleration | 1G(No load) | 1.5G(No load) |
Stage Material | Aluminium | Aluminium |
Stage Mass | 8.9 kg | 18.5kg |
